Document Actions

Megasonic

Up one level
Function
How does Megasonic Cleaning work
Convincing comparison
Comparison of the ultrasonic frequency of 40 kHz and 1 MHz during the developing process within the LIGA-Technique
Cleaning examples
Cleaning results at the best - Megasonic system with submersible transducer
Ultrasonic/Megasonic
We prevent your microstructures
Microstreaming
Microclean - particle free - SONOSYS
Expertise in cleaning technologies
»Inside Sonosys« means: up to 30% more efficiency
Concentrated Cleaning - Contactless with Megasonic Single Nozzle 1MHz
Particle removal of semiconductor wafers: